JPS6292643U - - Google Patents
Info
- Publication number
- JPS6292643U JPS6292643U JP18502285U JP18502285U JPS6292643U JP S6292643 U JPS6292643 U JP S6292643U JP 18502285 U JP18502285 U JP 18502285U JP 18502285 U JP18502285 U JP 18502285U JP S6292643 U JPS6292643 U JP S6292643U
- Authority
- JP
- Japan
- Prior art keywords
- brim
- semiconductor substrate
- drying apparatus
- substrate drying
- semicircular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Solid Materials (AREA)
- Centrifugal Separators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18502285U JPS6292643U (en]) | 1985-11-29 | 1985-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18502285U JPS6292643U (en]) | 1985-11-29 | 1985-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6292643U true JPS6292643U (en]) | 1987-06-13 |
Family
ID=31133259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18502285U Pending JPS6292643U (en]) | 1985-11-29 | 1985-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6292643U (en]) |
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1985
- 1985-11-29 JP JP18502285U patent/JPS6292643U/ja active Pending